title: Microstructure fabrication.
mesh_terms: D000535:Aluminum; D004553:Electric Conductivity; D004581:Electronics / Q000295:instrumentation*; D008669:Metallurgy / Q000295:instrumentation; D008904:Miniaturization / Q000295:instrumentation*; D012825:Silicon; D012822:Silicon Dioxide
chemical_list: D012822:Silicon Dioxide; D000535:Aluminum; D012825:Silicon