title: A multichannel depth probe fabricated using electron-beam lithography.
mesh_terms: D004553:Electric Conductivity; D004569:Electroencephalography / Q000295:instrumentation*; D004577:Electron Probe Microanalysis / Q000295:instrumentation; D004583:Electrons; D004741:Engraving and Engravings; D008768:Methylmethacrylates; D008839:Microelectrodes; D011108:Polymers
chemical_list: D008768:Methylmethacrylates; D011108:Polymers