title: [Application of charged particles to surface layer analysis--ion backscattering method (author's transl)].
mesh_terms: D008433:Mathematics; D010984:Platinum; D011874:Radiometry / Q000295:instrumentation / Q000379:methods*; D012542:Scattering, Radiation; D012825:Silicon; D014873:Water Pollutants / Q000032:analysis
chemical_list: D014873:Water Pollutants; D010984:Platinum; D012825:Silicon