title: The scanning probe microscope.
abstract: Scanning probe microscopy has evolved into a powerful tool since its inception in 1982. The scanning probe microscope has found applications in metrology, spectroscopy, and lithography. We will review the background of the technology, discuss the different types of scanning probe microscopes including the scanning tunneling microscope and the scanning force microscope, and present many of the applications for the instrument.
authors.affiliation: WYKO Corporation, Tucson, AZ 85706.
authors.forename: J
authors.initials: J
authors.lastname: Jahanmir
authors.forename: B G
authors.initials: BG
authors.lastname: Haggar
authors.forename: J B
authors.initials: JB
authors.lastname: Hayes
mesh_terms: D004247:DNA / Q000648:ultrastructure; D004563:Electrochemistry; D016252:Microscopy, Scanning Tunneling / Q000145:classification / Q000295:instrumentation / Q000379:methods*; D008967:Molecular Biology; D015394:Molecular Structure; D013057:Spectrum Analysis
chemical_list: D004247:DNA