title: Comparative study of ion milling techniques in cross-sectional transmission electron microscope specimen preparation.
authors.affiliation: Intel Corporation, Santa Clara, California 95052-8126.
authors.forename: E M
authors.initials: EM
authors.lastname: Zielinski
authors.forename: B
authors.initials: B
authors.lastname: Tracy
mesh_terms: D000535:Aluminum / Q000737:chemistry; D016591:Histocytological Preparation Techniques; D007477:Ions; D008854:Microscopy, Electron / Q000379:methods*; D013048:Specimen Handling; D014025:Titanium / Q000737:chemistry; D014414:Tungsten / Q000737:chemistry
chemical_list: D007477:Ions; D000535:Aluminum; D014025:Titanium; D014414:Tungsten