The influence of lens chromatic aberration on electron energy-loss spectroscopy quantitative measurements.
An investigation has been made into the effect of chromatic aberrations of a pre-spectrometer lens system on quantitative elemental analysis by electron energy loss spectroscopy (EELS). In transmission electron microscopy (TEM) diffraction mode, the measured effects are typically 150-330 times larger than if only objective-lens chromatic aberration were important. We discuss several methods of avoiding errors arising from chromatic aberration, including selection of a suitable optical mode (dependent on the desired spatial resolution), adjustment of the TEM imaging system so as to focus the system for a chosen energy loss, and analysis of a large area of a uniform specimen.
Yang
Y Y
YY
Department of Materials Science and Engineering, SUNY, Stony Brook 11794.
Egerton
R F
RF
D004577:Electron Probe Microanalysis / Q000295:instrumentation / Q000379:methods*; D008433:Mathematics; D008854:Microscopy, Electron / Q000295:instrumentation / Q000379:methods*