Toxicological investigations of waste products from the plasma etching process in the semiconductor industry.
Bauer
S
S
Institute of Industrial Toxicology, Martin Luther University, Halle, Germany.
Wolff
I
I
Werner
N
N
Hoffmann
P
P
Hillig
R
R
Voigt
R
R
Merten
B
B
Oemus
K
K
Rath
F W
FW
D000818:Animals; D001794:Blood Pressure / Q000187:drug effects; D001853:Bone Marrow / Q000187:drug effects / Q000648:ultrastructure; D002869:Chromosome Aberrations; D004331:Drosophila melanogaster; D005260:Female; D006339:Heart Rate / Q000187:drug effects; D007220:Industrial Waste / Q000009:adverse effects*; D007221:Industry; D008297:Male; D009153:Mutagens / Q000633:toxicity; D051381:Rats; D011919:Rats, Inbred Strains; D011995:Recombination, Genetic / Q000187:drug effects; D012306:Risk; D012666:Semiconductors
D007220:Industrial Waste; D009153:Mutagens