title: Simple method for the preparation of InP based samples for TEM investigation.
abstract: A novel, rapid, and simple method is described for the preparation of InP based samples for investigation by transmission electron microscopy (TEM). The key feature of the technique is Ar+ ion bombardment in an iodine ambient. Cross sectional micrographs of Au/InP samples are shown as an example. The technique developed produces a large area of transparent region.
authors.affiliation: Research Institute for Technical Physics, Hungarian Academy of Sciences, Budapest.
authors.forename: A
authors.initials: A
authors.lastname: Barna
authors.forename: B
authors.initials: B
authors.lastname: Pécz
mesh_terms: D001128:Argon; D005404:Fixatives; D007204:Indium; D007455:Iodine; D008854:Microscopy, Electron / Q000379:methods; D012666:Semiconductors; D013499:Surface Properties
chemical_list: D005404:Fixatives; D007204:Indium; D001128:Argon; D007455:Iodine