Simple method for the preparation of InP based samples for TEM investigation.
A novel, rapid, and simple method is described for the preparation of InP based samples for investigation by transmission electron microscopy (TEM). The key feature of the technique is Ar+ ion bombardment in an iodine ambient. Cross sectional micrographs of Au/InP samples are shown as an example. The technique developed produces a large area of transparent region.
Barna
A
A
Research Institute for Technical Physics, Hungarian Academy of Sciences, Budapest.
Pécz
B
B
D001128:Argon; D005404:Fixatives; D007204:Indium; D007455:Iodine; D008854:Microscopy, Electron / Q000379:methods; D012666:Semiconductors; D013499:Surface Properties
D005404:Fixatives; D007204:Indium; D001128:Argon; D007455:Iodine