title: Rapid plan view TEM sample preparation for semiconductor grain size analysis.
authors.affiliation: US Army, Electronics Technology and Devices Laboratory, Ft. Monmouth, New Jersey 07703.
authors.forename: M W
authors.initials: MW
authors.lastname: Cole
authors.forename: E S
authors.initials: ES
authors.lastname: Zakar
mesh_terms: D008854:Microscopy, Electron / Q000379:methods*; D012666:Semiconductors; D013048:Specimen Handling