title: Microfabrication techniques for integrated sensors and microsystems.
abstract: Integrated sensors and actuators are rapidly evolving to provide an important link between very large scale integrated circuits and nonelectronic monitoring and control applications ranging from biomedicine to automated manufacturing. As they continue to expand, entire microsystems merging electrical, mechanical, thermal, optical, magnetic, and perhaps chemical components should be possible on a common substrate.
authors.affiliation: Center for Integrated Sensors and Circuits, University of Michigan, Ann Arbor 48109.
authors.forename: K D
authors.initials: KD
authors.lastname: Wise
authors.forename: K
authors.initials: K
authors.lastname: Najafi
mesh_terms: D015374:Biosensing Techniques; D001709:Biotechnology / Q000295:instrumentation / Q000379:methods*; D008832:Microchemistry / Q000295:instrumentation / Q000379:methods