title: [Technical monitoring of air pollutant emissions in production of integrated circuits. Evaluation, conclusions and further problems].
authors.affiliation: Staatliche Umweltinspektion Erfurt.
authors.forename: B
authors.initials: B
authors.lastname: Ponsold
authors.forename: H
authors.initials: H
authors.lastname: Kath
mesh_terms: D000395:Air Pollutants, Occupational / Q000009:adverse effects / Q000032:analysis*; D000397:Air Pollution / Q000517:prevention & control; D004581:Electronics; D006801:Humans; D008452:Maximum Allowable Concentration; D014919:Wind
chemical_list: D000395:Air Pollutants, Occupational