title: A novel technique for the preparation of thin films for cross-sectional transmission electron microscopy.
abstract: A method is described for the preparation of cross-sectional samples of thin films for transmission electron microscopy. The technique produces larger amounts of thin region as compared with ion milling and eliminates the problems associated with ion beam damage. The requirement is that the films or multilayers must initially be deposited on a water-soluble substrate such as single-crystal NaCl.
authors.affiliation: Rockwell International Science Center, Thousand Oaks, California 91360.
authors.forename: J P
authors.initials: JP
authors.lastname: Heuer
authors.forename: D G
authors.initials: DG
authors.lastname: Howitt
mesh_terms: D008854:Microscopy, Electron / Q000379:methods*; D012116:Resins, Plant; D014025:Titanium
chemical_list: D012116:Resins, Plant; C009495:titanium dioxide; D014025:Titanium