[Use of the interpolation method to evaluate working conditions in high-frequency plasma technology].
D000395:Air Pollutants, Occupational; D009589:Nitrogen Oxides / Q000592:standards*; D009790:Occupations / Q000592:standards*; D010126:Ozone / Q000592:standards*; D011791:Quartz; D012822:Silicon Dioxide; D013672:Technology / Q000592:standards*
D000395:Air Pollutants, Occupational; D009589:Nitrogen Oxides; D011791:Quartz; D010126:Ozone; D012822:Silicon Dioxide
Primenenie interpoliatsionnogo metoda dlia otsenki usloviĭ truda pri vysokochastotnoĭ plazmennoĭ teknologii.