Cross-sectional TEM specimens of metal contacts to semiconductors.
Ivey
D G
DG
Department of Mining, Metallurgical and Petroleum Engineering, University of Alberta, Edmonton, Canada.
Piercy
G R
GR
D002857:Chromium; D006046:Gold; D008670:Metals / Q000032:analysis*; D008854:Microscopy, Electron / Q000379:methods*; D012666:Semiconductors
D008670:Metals; D002857:Chromium; D006046:Gold