The chemical nature of the microelectronics industry.
Many of the processes used in semiconductor fabrication involve chemical reactions. These reactions range from fundamental procedures such as electroplating and cleaning to plasma reactions and ion implantation. This article analyzes the various steps of the semiconductor fabrication process in light of their chemical nature.
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D055598:Chemical Phenomena; D002621:Chemistry; D004058:Diffusion; D007221:Industry; D008670:Metals; D012666:Semiconductors; D012825:Silicon; D014835:Volatilization
D008670:Metals; D012825:Silicon