title: The chemical nature of the microelectronics industry.
abstract: Many of the processes used in semiconductor fabrication involve chemical reactions. These reactions range from fundamental procedures such as electroplating and cleaning to plasma reactions and ion implantation. This article analyzes the various steps of the semiconductor fabrication process in light of their chemical nature.
authors.forename: T
authors.initials: T
authors.lastname: Rohm
authors.forename: L
authors.initials: L
authors.lastname: Scarpace
authors.forename: L
authors.initials: L
authors.lastname: Fluer
mesh_terms: D055598:Chemical Phenomena; D002621:Chemistry; D004058:Diffusion; D007221:Industry; D008670:Metals; D012666:Semiconductors; D012825:Silicon; D014835:Volatilization
chemical_list: D008670:Metals; D012825:Silicon