title: Toxic gases used in the microelectronics industry.
abstract: Toxic gases are among the most dangerous materials used in manufacturing semiconductors and related devices. The storage, handling, and disposal of these gases pose a major hazard to workers and to communities located near high-technology companies. It must be anticipated that accidents, acts of terrorism, and natural calamities will result in exposure. Flammability, corrosiveness, and concentration must be considered, as well as the immediate danger to life and known human health effects of the gases used.
authors.forename: P H
authors.initials: PH
authors.lastname: Wald
authors.forename: C E
authors.initials: CE
authors.lastname: Becker
mesh_terms: D000395:Air Pollutants, Occupational / Q000633:toxicity*; D000641:Ammonia / Q000633:toxicity; D001151:Arsenic / Q000633:toxicity; D001152:Arsenicals; D001894:Borohydrides / Q000633:toxicity; D006801:Humans; D006851:Hydrochloric Acid / Q000633:toxicity; D010720:Phosphines / Q000633:toxicity; D012666:Semiconductors; D012821:Silanes / Q000633:toxicity
chemical_list: D000395:Air Pollutants, Occupational; D001152:Arsenicals; D001894:Borohydrides; D010720:Phosphines; D012821:Silanes; D000641:Ammonia; C024731:diborane; D001151:Arsenic; D006851:Hydrochloric Acid; C006633:arsine