title: Dopant materials used in the microelectronics industry.
abstract: Advances in microelectronics have transformed the occupational environment of the electronics industry. Large quantities of potentially hazardous materials are now in routine use as integrated circuit manufacturing becomes more complex and specialized. While the acute hazards associated with these dopant materials are clear, the subacute and chronic effects are less evident. Many of these elements are trace elements in humans and may play roles in health and disease in minute concentrations. Early detection and prevention of adverse health effects requires both astute medical surveillance, industrial hygiene, and safety engineering efforts to eliminate the sources of exposure to workers.
authors.forename: D R
authors.initials: DR
authors.lastname: Lewis
mesh_terms: D000965:Antimony / Q000633:toxicity; D001151:Arsenic / Q000633:toxicity; D001895:Boron / Q000633:toxicity; D004058:Diffusion; D004785:Environmental Pollutants / Q000633:toxicity*; D006801:Humans; D010758:Phosphorus / Q000633:toxicity; D012643:Selenium / Q000633:toxicity; D012666:Semiconductors
chemical_list: D004785:Environmental Pollutants; D010758:Phosphorus; D000965:Antimony; D012643:Selenium; D001151:Arsenic; D001895:Boron