title: Cross-sectional transmission electron microscopy of silicon LSI circuits and Josephson junction devices.
abstract: Cross-sectional transmission electron microscopy (XTEM) has been used to diagnose silicon LSI circuits and Josephson junction devices. For LSI circuits, some typical failure problems have been presented. For Nb-Si-Nb Josephson junction, microholes in the thin silicon layer have observed, and they are responsible for the short circuiting of these devices.
mesh_terms: D003201:Computers / Q000592:standards*; D004553:Electric Conductivity; D008854:Microscopy, Electron / Q000379:methods*; D012825:Silicon
chemical_list: D012825:Silicon