title: Microelectronic sensors for simultaneous measurement of PO2 and pH.
abstract: Sensors capable of simultaneous measurement of pH and PO2 in an aqueous solution have been fabricated in planar form using microelectronic technology. Separate potentiometric metal-metal oxide pH and three electrode amperemetric PO2 sensors have been fabricated together on a silicon chip with active surface of 2 x 3 mm. Rhodium-rhodium oxide electrodes operating in a cyclic voltammetry mode have also been studied and show sensitivity to both pH and PO2 in different regions of the voltage swept curve.
authors: Case Western Reserve University, Cleveland, Ohio.
authors: C C
authors: CC
authors: Liu
authors: M R
authors: MR
authors: Neuman
authors: L T
authors: LT
authors: Romankiw
authors: E B
authors: EB
authors: Makovos
mesh_terms: D000136:Acid-Base Equilibrium; D001785:Blood Gas Monitoring, Transcutaneous / Q000295:instrumentation*; D006801:Humans; D006863:Hydrogen-Ion Concentration; D008839:Microelectrodes