Definition of the geometric area of a microelectrode tip by plasma etching of Parylene.
D004558:Electric Stimulation / Q000295:instrumentation*; D006801:Humans; D008433:Mathematics; D008839:Microelectrodes; D011108:Polymers; D014992:Xylenes
D011108:Polymers; D014992:Xylenes; C011055:parylene