High spatial resolution analysis using parallel detection eels.
The application of parallel detection electron energy loss spectroscopy to the characterization of small particles or interfaces is demonstrated. Data are presented that show variations of low energy loss plasmons, Al L23 edge near edge fine structure, and oxygen concentration with spatial resolution better than 10 nm. The use of this technique for chemical and electronic structure measurements from very small specimen volumes is discussed.
D008854:Microscopy, Electron / Q000379:methods*; D008855:Microscopy, Electron, Scanning / Q000379:methods*