title: The influence of objective lens aberrations in energy-loss spectrometry.
abstract: The conditions under which the energy resolution and collection efficiency in electron energy-loss spectrometry are limited by the spherical and chromatic aberrations of the objective lens have been studied. It is shown that, for the optimum settings of the pre-spectrometer optics, the energy resolution will be of the same order in diffraction mode as it is in magnification mode. The influence of the aberrations on the practice of energy-loss spectroscopy is discussed, and it is demonstrated that the chromatic aberration can act as a broadband filter for energy-loss electrons.
mesh_terms: D004577:Electron Probe Microanalysis / Q000295:instrumentation* / Q000379:methods; D007909:Lenses; D008433:Mathematics; D008854:Microscopy, Electron / Q000295:instrumentation* / Q000379:methods