title: Electron, proton and photon induced X-ray microprobes: analytic sensitivity versus spatial resolution.
mesh_terms: D004577:Electron Probe Microanalysis; D008027:Light; D008433:Mathematics; D010315:Particle Accelerators; D011522:Protons; D013052:Spectrometry, X-Ray Emission
chemical_list: D011522:Protons