[Estimation of uranium, thorium and alpha emitters in LSI (large scale integration) components].
D000512:Alpha Particles; D005720:Gamma Rays; D008722:Methods; D009501:Neutron Activation Analysis; D011874:Radiometry; D012666:Semiconductors; D013057:Spectrum Analysis; D013910:Thorium / Q000032:analysis*; D014501:Uranium / Q000032:analysis*
D014501:Uranium; D013910:Thorium