title: [Biomedical electrode with silicon nitride film (author's transl)].
mesh_terms: D004567:Electrodes, Implanted; D004569:Electroencephalography / Q000295:instrumentation; D006801:Humans; D008567:Membranes, Artificial; D012825:Silicon; D017655:Silicon Compounds
chemical_list: D008567:Membranes, Artificial; D017655:Silicon Compounds; C032734:silicon nitride; D012825:Silicon