title: Determination of Na, Br and Cu in resists by neutron activation analysis.
mesh_terms: D000201:Activation Analysis; D001966:Bromine / Q000032:analysis*; D003300:Copper / Q000032:analysis*; D009501:Neutron Activation Analysis; D012964:Sodium / Q000032:analysis*
chemical_list: D003300:Copper; D012964:Sodium; D001966:Bromine