title: Fabrication of Au/p-Si Schottky barrier for EBIC study.
abstract: A simple method for the fabrication of a Au/p-Si Schottky barrier suitable for electron beam induced current (EBIC) study has been developed. The mechanical and electrical properties of the fabricated Au/p-Si Schottky barriers have been tested, and EBIC measurements of the dislocation contrast have been conducted using the fabricated Schottky barriers.
authors.affiliation: University of Tennessee, Knoxville 37996.
authors.forename: X
authors.initials: X
authors.lastname: Zhang
authors.forename: D
authors.initials: D
authors.lastname: Joy
mesh_terms: D006046:Gold; D008855:Microscopy, Electron, Scanning / Q000379:methods*; D012666:Semiconductors; D012825:Silicon
chemical_list: D006046:Gold; D012825:Silicon