title: Specimen preparation of free-standing, thick-metal, multilayered films in cross section.
abstract: A new preparation method permits the production of large-area, electron-transparent, transmission electron microscopy (TEM) specimens in cross section of free-standing, thick, multilayered structures. Such production often has been difficult in the past because of large chemical differences between the component layers in the multilayer. This difference usually results in a large difference in thinning rates between the layers. A unique combination of electroplating, lapping, dimpling, and low-angle ion milling is a successful and reproducible technique for producing high-quality TEM specimens of these complex materials. Procedures and results presented here are for a 304 stainless-steel/copper multilayer having a repeat period of 20 nm and a total thickness of 20 microns.
authors.affiliation: Chemistry and Materials Science Department, Lawrence Livermore National Laboratory, Livermore, California 94551.
authors.forename: M A
authors.initials: MA
authors.lastname: Wall
mesh_terms: D003300:Copper; D004595:Electroplating / Q000379:methods; D008854:Microscopy, Electron / Q000379:methods*; D013193:Stainless Steel
chemical_list: D013193:Stainless Steel; D003300:Copper