title: Microfabrication and microsensors.
abstract: In order to fabricate microsensors, a micromachining, microfabrication technique based on LSI technologies has been used. In this paper, useful micromachining techniques are described. Examples of integrated microsensors, such as a pressure sensor including a readout circuit and a multisensor cell for blood gas analysis, are introduced. Microflow control devices, such as microvalve and a micropump for integrated chemical analysis systems, are also described.
authors.affiliation: Department of Mechatronics & Precision Engineering, Tohoku University, Sendai, Japan.
authors.forename: S
authors.initials: S
authors.lastname: Shoji
authors.forename: M
authors.initials: M
authors.lastname: Esashi
mesh_terms: D001784:Blood Gas Analysis / Q000295:instrumentation*; D017022:Flow Injection Analysis / Q000295:instrumentation*; D006801:Humans