title: Applications of microfabrication techniques in electrochemical sensor development.
abstract: Electrochemical sensors have been used either as a whole or as an integral part of a chemical and biological sensing device. Microfabrication technology has been used in the development of electrochemical sensors. The recent advancement of micromachining techniques adds new impetus to electrochemical sensor development. Most noticeable is the application of anisotropic chemical etching, plasma etching, sacrificial layer methods, and high aspect ratio X-ray lithography to enhance the opportunity to produce scientifically and commercially viable electrochemical sensors. Examples will be used to illustrate the potential of microfabrication and micromachining techniques in electrochemical sensor development.
authors.affiliation: Edison Sensor Technology Center, Case Western Reserve University, Cleveland, OH.
authors.forename: C C
authors.initials: CC
authors.lastname: Liu
mesh_terms: D016880:Anisotropy; D015374:Biosensing Techniques; D004563:Electrochemistry; D004573:Electrolytes / Q000737:chemistry; D006358:Hot Temperature; D008904:Miniaturization; D010100:Oxygen / Q000032:analysis; D012680:Sensitivity and Specificity; D013696:Temperature
chemical_list: D004573:Electrolytes; D010100:Oxygen