title: Sample preparation technique for cross-sectional transmission electron microscopy of quantum wire structures.
abstract: A novel cross-sectional sample preparation technique for quantum wire (QWR) structures is described. By coating a thin layer of Au with a designed pattern on the sample as a marker to indicate the position of the wire pattern, the location of the thinned area can be controlled precisely. An example of applying this technique to an InGaAs/GaAs QWR structure is demonstrated. This technique can also be applied to any other small dimensional structures or devices with specific regions of interest.
authors.affiliation: Department of Electrical Engineering, Cornell University, Ithaca, New York 14853.
authors.forename: Y P
authors.initials: YP
authors.lastname: Chen
authors.forename: J D
authors.initials: JD
authors.lastname: Reed
authors.forename: S S
authors.initials: SS
authors.lastname: O'Keefe
authors.forename: W J
authors.initials: WJ
authors.lastname: Schaff
authors.forename: L F
authors.initials: LF
authors.lastname: Eastman
mesh_terms: D006046:Gold; D008854:Microscopy, Electron / Q000379:methods*
chemical_list: D006046:Gold