Sample preparation technique for cross-sectional transmission electron microscopy of quantum wire structures.
A novel cross-sectional sample preparation technique for quantum wire (QWR) structures is described. By coating a thin layer of Au with a designed pattern on the sample as a marker to indicate the position of the wire pattern, the location of the thinned area can be controlled precisely. An example of applying this technique to an InGaAs/GaAs QWR structure is demonstrated. This technique can also be applied to any other small dimensional structures or devices with specific regions of interest.
Chen
Y P
YP
Department of Electrical Engineering, Cornell University, Ithaca, New York 14853.
Reed
J D
JD
O'Keefe
S S
SS
Schaff
W J
WJ
Eastman
L F
LF
D006046:Gold; D008854:Microscopy, Electron / Q000379:methods*
D006046:Gold