Laser exposure of Parylene-C insulated microelectrodes.
The polymer, Parylene-C, has proven to be a biocompatible insulation for microelectrodes. However, due to its inert nature, the removal of the insulation from the tips of microelectrodes is difficult. This paper describes the use of an ultraviolet laser system to micromachine Parylene-C insulation with photoablation to precisely expose an arbitrary shape recording or stimulating surface.
Schmidt
E M
EM
Laboratory of Neural Control, National Institute of Neurological Disorders and Stroke, Bethesda, MD 20892-4455, USA. ems@helix.nih.gov
Bak
M J
MJ
Christensen
P
P
D007834:Lasers; D008422:Materials Testing; D008839:Microelectrodes; D008855:Microscopy, Electron, Scanning; D010777:Photochemistry; D011108:Polymers; D014466:Ultraviolet Rays; D014992:Xylenes
D011108:Polymers; D014992:Xylenes; C011055:parylene