title: Light-directed synthesis of high-density oligonucleotide arrays using semiconductor photoresists.
abstract: High-density arrays of oligonucleotide probes are proving to be powerful new tools for large-scale DNA and RNA sequence analysis. A method for constructing these arrays, using light-directed DNA synthesis with photo-activatable monomers, can currently achieve densities on the order of 10(6) sequences/cm2. One of the challenges facing this technology is to further increase the volume, complexity, and density of sequence information encoded in these arrays. Here we demonstrate a new approach for synthesizing DNA probe arrays that combines standard solid-phase oligonucleotide synthesis with polymeric photoresist films serving as the photoimageable component. This opens the way to exploiting high-resolution imaging materials and processes from the microelectronics industry for the fabrication of DNA probe arrays with substantially higher densities than are currently available.
authors.affiliation: Affymetrix, Inc., Santa Clara, CA 95051, USA. glenn_mcgall@affymetrix.com
authors.forename: G
authors.initials: G
authors.lastname: McGall
authors.forename: J
authors.initials: J
authors.lastname: Labadie
authors.forename: P
authors.initials: P
authors.lastname: Brock
authors.forename: G
authors.initials: G
authors.lastname: Wallraff
authors.forename: T
authors.initials: T
authors.lastname: Nguyen
authors.forename: W
authors.initials: W
authors.lastname: Hinsberg
mesh_terms: D001483:Base Sequence; D004247:DNA / Q000138:chemical synthesis*; D015342:DNA Probes / Q000138:chemical synthesis; D019793:Fluorescein; D005452:Fluoresceins; D005456:Fluorescent Dyes; D008027:Light; D009838:Oligodeoxyribonucleotides / Q000138:chemical synthesis* / Q000737:chemistry; D012313:RNA / Q000138:chemical synthesis; D012666:Semiconductors
chemical_list: D015342:DNA Probes; D005452:Fluoresceins; D005456:Fluorescent Dyes; D009838:Oligodeoxyribonucleotides; D012313:RNA; D004247:DNA; D019793:Fluorescein