title: Cross-section TEM sample preparation of multilayer and poorly adhering films.
abstract: The preparation of TEM cross-section samples from multilayer films or poorly adhering films is discussed in detail in a step-by-step approach designed to enable a competent experimentalist to reproduce the technique. The samples are mounted on an aperture grid and mechanically polished to 2-3 microns in thickness. After ion beam milling for a short period of time (less than 1 hour), a large electron transparent area is obtained. Examples from several thin film systems are discussed.
authors.affiliation: Department of Materials and Metallurgical Engineering, Queen's University, Kingston, Ontario, Canada.
authors.forename: L
authors.initials: L
authors.lastname: Weaver
mesh_terms: D008854:Microscopy, Electron / Q000379:methods*