A silicon bidirectional flow sensor for measuring respiratory flow.
We describe a solid-state, silicon integrated, bidirectional flow sensor for respiratory applications. The sensor is a thermal vector sensor. The electronic circuitry for obtaining bidirectional sensitivity is presented together with actual application to a healthy volunteer put on mechanical ventilation. The sensor's input flow range is from -60 to +60 L/min, and its rise-time is < or = 40 ms and fall-time is < or = 60 ms. The effect of changes in gas composition as used in mechanically ventilated patients on the sensor output signal are estimated to be less than 2%. The temperature sensitivity is about -1.5% per degree Celsius.
van Putten
M J
MJ
Department of Neurology, Academic Hospital Leiden, The Netherlands. putten@rullf2.medfac.leidenuniv.nl
van Putten
M H
MH
van Putten
A F
AF
Pompe
J C
JC
Bruining
H A
HA
D004867:Equipment Design / Q000706:statistics & numerical data; D006801:Humans; D012123:Pulmonary Ventilation; D012121:Respiration, Artificial / Q000295:instrumentation / Q000379:methods / Q000706:statistics & numerical data; D012666:Semiconductors / Q000706:statistics & numerical data; D012680:Sensitivity and Specificity; D012825:Silicon; D013696:Temperature; D013814:Thermal Conductivity; D012122:Ventilators, Mechanical / Q000706:statistics & numerical data
D012825:Silicon