title: [Biological and physical evaluation of the functional materials glass and silicon for micromechanical effectors].
authors.affiliation: Institut für Biomedizinische Technik, Fakultät Elektrotechnik, Technische Universität Dresden.
authors.forename: J
authors.initials: J
authors.lastname: Uhlemann
authors.forename: E
authors.initials: E
authors.lastname: Töpfer
authors.forename: R
authors.initials: R
authors.lastname: Freyer
authors.forename: T
authors.initials: T
authors.lastname: Kühnel
authors.forename: U
authors.initials: U
authors.lastname: Streller
authors.forename: A
authors.initials: A
authors.lastname: Weck-Heimann
authors.forename: R
authors.initials: R
authors.lastname: Entzeroth
mesh_terms: D000818:Animals; D001672:Biocompatible Materials; D002417:Cattle; D002460:Cell Line; D002470:Cell Survival / Q000502:physiology; D046508:Culture Techniques; D005898:Glass; D006801:Humans; D008422:Materials Testing; D019060:Minimally Invasive Surgical Procedures / Q000295:instrumentation*; D012825:Silicon; D013499:Surface Properties
chemical_list: D001672:Biocompatible Materials; D012825:Silicon
vernacular_title: Biologische und physikalische Beurteilung der Funktionswerkstoffe Glas und Silicium für mikromechanische Aktoren.