title: Composition and thermal-annealing-induced short-range ordering changes in amorphous hydrogenated silicon carbide films as investigated by extended x-ray-absorption fine structure and infrared absorption.
authors.lastname: El Khakani MA
authors.initials: D
authors.lastname: Guay
authors.initials: M
authors.lastname: Chaker
authors.initials: XH
authors.lastname: Feng