title: Real-time spectroscopic ellipsometry study of the growth of amorphous and microcrystalline silicon thin films prepared by alternating silicon deposition and hydrogen plasma treatment.
authors.initials: N
authors.lastname: Layadi
authors.lastname: Roca i Cabarrocas P
authors.initials: B
authors.lastname: Drévillon
authors.initials: I
authors.lastname: Solomon