title: Tomographic Atom Probe: New Dimension in Materials Analysis.
abstract: : Materials science requires the use of increasingly powerful tools in materials analysis. The last 20 years have witnessed the development of a number of analytical techniques. However, among these techniques, only a few allow observation and analysis of materials at the nanometer level. The tomographic atom probe (TAP) is a three-dimensional atom-probe (3-DAP) developed at the University of Rouen. In this instrument, the specimen is field evaporated, atomic layer by atomic layer, and the use of a position-sensing system makes it possible to map out the chemical identity of individual atoms within each field-evaporated layer on a nearly atomic scale. After analysis, the volume of matter removed from the specimen can be reconstructed atom by atom in the three dimensions of real space. The main advantages of the 3-DAP is its single-atom sensitivity and very high spatial resolution. In addition to 3-D visual information on chemical heterogeneity, 3-D images give an accurate measurement of the composition of any feature without any convolution bias. This study first describes the history of the 3-DAP technique. Its main features and the latest developments of the TAP are then detailed. The performance of this instrument is illustrated through two recent applications in materials science. Possible ways to further improve the technique are also discussed.
authors.affiliation: Groupe de Métallurgie Physique, UMR 6634 CNRS, Université et INSA de Rouen, Faculté des Sciences de Rouen, 76821 Mont-Saint-Aignan Cedex, France
authors.initials: B
authors.lastname: Deconihout
authors.initials: C
authors.lastname: Pareige
authors.initials: P
authors.lastname: Pareige
authors.initials: D
authors.lastname: Blavette
authors.initials: A
authors.lastname: Menand