title: High resolution electron backscatter diffraction with a field emission gun scanning electron microscope.
abstract: A scanning electron microscope with a thermal field emission gun (FEGSEM) is found to offer significant improvements in electron backscatter diffraction performance over a conventional W-filament scanning microscope. The spatial resolution is improved by a factor of approximately 3 in the FEGSEM and is optimized at probe currents of 50-300 nA and at 10-15 keV. The angular accuracy is optimized at probe currents above approximately 150 nA and at 30 keV.
authors.affiliation: Manchester Materials Science Centre, Grosvenor Street, Manchester M1 7HS, U.K. john.humphreys@umist.ac.uk
authors.forename: F J
authors.initials: FJ
authors.lastname: Humphreys
authors.forename: I
authors.initials: I
authors.lastname: Brough
mesh_terms: D008855:Microscopy, Electron, Scanning