title: A high-throughput search for electronic materials-thin-film dielectrics.
abstract: Parallel synthesis together with high-throughput screening was used to identify candidate materials for integrated circuit applications that demand a superior high permittivity dielectric thin film. Specifically, we developed a "continuous-composition spread" (CCS) technique to synthesize much of a pseudoternary oxide system in a single deposition and used this in conjunction with a high-throughput measurement protocol, thereby allowing each chemical system to be deposited and evaluated in about 24 h. This approach led to the identification of compositions in the Zr-Sn-Ti-O system with promising properties. The same technique was used to determine the optimum compositions as a function of processing parameters. Films with the composition Zr(.2)Sn(.2)Ti(.6)O(2) were then prepared using a conventional synthetic technique (on-axis sputtering) and were verified to have excellent properties. Thus, the CCS technique has demonstrated utility in rapidly identifying and developing a useful new material.
authors.affiliation: Bell Labs, Lucent Technologies, Murray Hill, New Jersey 09794, USA.
authors.forename: R B
authors.initials: RB
authors.lastname: van Dover
authors.forename: L F
authors.initials: LF
authors.lastname: Schneemeyer
authors.forename: R M
authors.initials: RM
authors.lastname: Fleming
authors.forename: H A
authors.initials: HA
authors.lastname: Huggins
mesh_terms: D020650:Combinatorial Chemistry Techniques / Q000379:methods*; D004581:Electronics / Q000379:methods*; D008422:Materials Testing