title: The effect of fast secondary electrons on x-ray microanalysis in the scanning electron microscope.
abstract: In this paper, the effect of fast secondary electrons (FSE), which result from inelastic scattering of incident electrons, on the characterization of materials in the scanning electron microscope are investigated with the aid of Monte Carlo simulations. The effect of FSE on x-ray microanalysis of light elements is investigated. A full description of the Monte Carlo simulations of FSE in solids is given.
authors.affiliation: Département de génie mécanique, Université de Sherbrooke, Québec, Canada.
authors.forename: R
authors.initials: R
authors.lastname: Gauvin
authors.forename: P
authors.initials: P
authors.lastname: Hovington
authors.forename: D
authors.initials: D
authors.lastname: Drouin
mesh_terms: D001895:Boron / Q000032:analysis; D004548:Elasticity; D004577:Electron Probe Microanalysis / Q000379:methods* / Q000592:standards; D004583:Electrons; D007501:Iron / Q000032:analysis; D008855:Microscopy, Electron, Scanning / Q000379:methods* / Q000592:standards; D009010:Monte Carlo Method; D012542:Scattering, Radiation
chemical_list: D007501:Iron; D001895:Boron