Perspectives on MEMS in bioengineering: a novel capacitive position microsensor.
We describe a novel capacitive position sensor using micromachining to achieve high sensitivity and large range of motion. These sensors require a new theoretical framework to describe and optimize their performance. Employing a complete description of the electrical fields, the sensor should deviate from the standard geometries used for capacitive sensors. By this optimization, the sensor gains a twofold increase in sensitivity. Results on a PC board 10x model imply that the micromachined sensor should achieve a sensitivity of less than 10 nm over 500-micron range of travel. Some bioengineering applications are addressed, including positioning of micromirrors for laser surgery and dose control for implantable drug delivery systems.
Pedrocchi
A
A
Department of Bioengineering, Politecnico di Milano, Italy. pedrocchi@biomed.polimi.it
Hoen
S
S
Ferrigno
G
G
Pedotti
A
A
D016503:Drug Delivery Systems / Q000295:instrumentation; D004553:Electric Conductivity; D004566:Electrodes; D004867:Equipment Design; D053685:Laser Therapy / Q000295:instrumentation