title: Perspectives on MEMS in bioengineering: a novel capacitive position microsensor.
abstract: We describe a novel capacitive position sensor using micromachining to achieve high sensitivity and large range of motion. These sensors require a new theoretical framework to describe and optimize their performance. Employing a complete description of the electrical fields, the sensor should deviate from the standard geometries used for capacitive sensors. By this optimization, the sensor gains a twofold increase in sensitivity. Results on a PC board 10x model imply that the micromachined sensor should achieve a sensitivity of less than 10 nm over 500-micron range of travel. Some bioengineering applications are addressed, including positioning of micromirrors for laser surgery and dose control for implantable drug delivery systems.
authors.affiliation: Department of Bioengineering, Politecnico di Milano, Italy. pedrocchi@biomed.polimi.it
authors.forename: A
authors.initials: A
authors.lastname: Pedrocchi
authors.forename: S
authors.initials: S
authors.lastname: Hoen
authors.forename: G
authors.initials: G
authors.lastname: Ferrigno
authors.forename: A
authors.initials: A
authors.lastname: Pedotti
mesh_terms: D016503:Drug Delivery Systems / Q000295:instrumentation; D004553:Electric Conductivity; D004566:Electrodes; D004867:Equipment Design; D053685:Laser Therapy / Q000295:instrumentation