Compact water-window transmission X-ray microscopy.
We demonstrate sub-100 nm resolution water-window soft X-ray full-field transmission microscopy with a compact system. The microscope operates at lambda = 3.37 nm and is based on a 100 Hz table-top regenerative debris-free droplet-target laser-plasma X-ray source in combination with normal-incidence multilayer condenser optics for sample illumination. High-spatial-resolution imaging is performed with a 7.3% efficiency nickel zone plate and a 1024 x 1024 pixel CCD detector. Images of dry test samples are recorded with exposure times of a few minutes and show features smaller than 60 nm.
Berglund
M
M
Biomedical and X-Ray Physics, Royal Institute of Technology, SE-10044 Stockholm, Sweden; Forschungseinrichtung Röntgenphysik, Georg-August Universität, D-37073 Göttingen, Germany.
Rymell
L
L
Peuker
M
M
Wilhein
T
T
Hertz
H M
HM
D017377:Diatoms / Q000648:ultrastructure*; D007834:Lasers; D008854:Microscopy, Electron / Q000295:instrumentation / Q000379:methods; D055095:Optics and Photonics; D014965:X-Rays