STM analyses of surface phenomena in Si(1 0 0) under proton irradiation
Detailed investigation of surface phenomena (sputtering, blistering, flaking) at silicon irradiated with 700 keV protons to fluences in the range of 10(16)-10(18) p/cm2 was carried out with the help of an open-air scanning tunneling microscope of original design. Multiple STM images of irradiated sample surfaces containing both intact and broken blisters were analyzed, and their distributions by sizes and evolution under thermal annealing estimated.
Kozodaev
MA
Institute of Theoretical and Experimental Physics, Moscow, Russia.
Makeev
ON
Suvorov
AL