title: Multiple-input microcantilever sensors
abstract: A surface-micromachined micro-electro-mechanical-system (MEMS) process has been used to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays. Cantilever motion due to absorption-induced stress was readout using a custom-designed, eight-channel integrated circuit. Combined hydrogen and mercury vapor detection was achieved with a palm-sized, self-powered module with spread-spectrum telemetry reporting.
authors.affiliation: Oak Ridge National Laboratory, TN 37831, USA.
authors.initials: CL
authors.lastname: Britton
authors.initials: RL
authors.lastname: Jones
authors.initials: PI
authors.lastname: Oden
authors.initials: Z
authors.lastname: Hu
authors.initials: RJ
authors.lastname: Warmack
authors.initials: SF
authors.lastname: Smith
authors.initials: WL
authors.lastname: Bryan
authors.initials: JM
authors.lastname: Rochelle