The spatial distribution and resolution of coaxial backscattered electrons in SEM, calculated by monte carlo simulations
We simulate, within a sample, the trajectories of the backscattered electrons detected in a scanning electron microscopy with a particular detection geometry. Thus we obtain the depth and lateral distributions, according to the adjustable parameter values, of the detected electrons. Finally, the scanline profile across a chemical edge is drawn. The conditions corresponding to the best lateral resolution are established; we obtain an ultimate resolution of the same order as the beam diameter.
Jiang
CZ
Departement de Physique des Materiaux, Universite Claude Bernard Lyon1, UMR 5586, 43 Boulevard du 11 Novembre 1918, 69622 Villeurbanne Cedex, France.
Rosenberg
N
Morin
P