title: The spatial distribution and resolution of coaxial backscattered electrons in SEM, calculated by monte carlo simulations
abstract: We simulate, within a sample, the trajectories of the backscattered electrons detected in a scanning electron microscopy with a particular detection geometry. Thus we obtain the depth and lateral distributions, according to the adjustable parameter values, of the detected electrons. Finally, the scanline profile across a chemical edge is drawn. The conditions corresponding to the best lateral resolution are established; we obtain an ultimate resolution of the same order as the beam diameter.
authors.affiliation: Departement de Physique des Materiaux, Universite Claude Bernard Lyon1, UMR 5586, 43 Boulevard du 11 Novembre 1918, 69622 Villeurbanne Cedex, France.
authors.initials: CZ
authors.lastname: Jiang
authors.initials: N
authors.lastname: Rosenberg
authors.initials: P
authors.lastname: Morin