Preparation of damage-free glass TEM specimens
A jet polishing technique to chemically thin glass specimens for transmission electron microscopy (TEM) after a preliminary mechanical dimpling step has been developed. Slightly modified commercial equipment is used with automatic optical termination of the polishing process to produce foils exhibiting large, high quality, electron transparent regions.
Kestel
BJ
Materials Science Division, Argonne National Laboratory, IL 60439, USA.