Piezoelectric excitation of semiconductor plates
The microelectronics revolution is due largely to the electronic properties of semiconducting crystals. Almost all binary semiconductors are piezoelectric, and can be fashioned with high resistivity, permitting incorporation of mechanical motion as an additional variable, leading to the possibility of mixed-effect devices with novel properties. In order to further develop these new structures, this paper provides newly derived expressions for piezoelectric excitation of simple thickness plate modes of binary semiconductors, by both thickness and lateral electric fields.
Ballato
A
US Army Communications-Electronics Command, Fort Monmouth, NJ, USA. a.ballato@ieee.org