A slotted waveguide field applicator to sustain large diameter uniform plasma cylinders.
We describe a slotted waveguide field applicator and present the results of experimental investigation. The experimental results show that it can efficiently transfer power to plasma in the wide pressure range. Specially, it is able to produce a large diameter uniform plasma cylinder with diameter over 160 mm. The electron temperature and density are 2-4 eV and 10(10)-10(11) cm-3, respectively, under conditions of the pressure below 135 Pa and the microwave power 500-900 w. In addition, the primary study of the surface-wave modes indicate that the mode of m = 6 can be excited and propagate.
Wu
C
C
Structure Research Laboratory, University of Science & Technology of China, Hefei, Anhui, P. R. China.
Zhan
R
R
Huang
W
W
D008872:Microwaves