title: Direct measurement of electron beam scattering in the environmental scanning electron microscope using phosphor imaging plates
abstract: Phosphor imaging plate technology has made it possible to directly image the distribution of primary beam electrons and scattered electrons in the environmental scanning electron microscope. The phosphor plate is exposed under electron scattering conditions in the microscope chamber. When processed, the electron intensity distribution is displayed as a digital image. The image is a visual representation of the electron probe and skirt and may provide the basis for a more accurate model.
authors.affiliation: Surface and Microanalysis Science Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899-8371, USA. scott.wight@nist.gov
authors.initials: SA
authors.lastname: Wight
authors.initials: CJ
authors.lastname: Zeissler