The reduction of the beam gas interactions in the variable pressure scanning electron microscope with the use of helium gas
This paper presents experimental observations on electron scattering by gases (helium and air) in the specimen chamber of a variable pressure scanning electron microscope. It shows an important reduction of the beam scattering with the use of helium gas, and the consequences for the x-ray microanalysis are discussed.
Adamiak
B
Equipe de Clinice Physique de la matiere condensee, Universite d'Artois, Faculte Jean Perrin, Lens, France.
Mathieu
C