title: The reduction of the beam gas interactions in the variable pressure scanning electron microscope with the use of helium gas
abstract: This paper presents experimental observations on electron scattering by gases (helium and air) in the specimen chamber of a variable pressure scanning electron microscope. It shows an important reduction of the beam scattering with the use of helium gas, and the consequences for the x-ray microanalysis are discussed.
authors.affiliation: Equipe de Clinice Physique de la matiere condensee, Universite d'Artois, Faculte Jean Perrin, Lens, France.
authors.initials: B
authors.lastname: Adamiak
authors.initials: C
authors.lastname: Mathieu