Determination of secondary electron spectra from insulators
A new technique for the determination of secondary electron (SE) spectra of insulators in a scanning electron microscope environment is presented. It is based on a capacitatively coupled charge measurement by subjecting the insulating film to a controlled pulsed electron beam. With the use of a planar grid analyzer configuration, an algorithm is used to estimate the SE spectrum based on normalized values of the S-curve obtained. Secondary electron spectra from several insulating materials employed in integrated circuit manufacturing, including silicon nitride (Si3N4), AZ 1350J photoresist, and pyralin polyimide, have been measured.
Yong
YC
Centre for Integrated Circuit Failure Analysis and Reliability, Faculty of Engineering, National University of Singapore.
Thong
JT