title: Microcalorimeter energy-dispersive spectrometry using a low voltage scanning electron microscope
abstract: We describe the current performance of the prototype microcalorimeter energy-dispersive spectrometer (&mgr;cal EDS) developed at NIST for X-ray microanalysis. We show that the low-energy &mgr;cal EDS, designed for operation in the energy range 0.2-2 keV, offers significant advantages for low-beam-energy microanalysis. We present several examples in which the prototype &mgr;cal EDS has been used to solve problems in low-voltage microanalysis, including the analysis of tungsten silicide (WSi2), titanium nitride (TiN) and barium titanate (BaTiO3) and the measurement of chemical shifts in Fe and C compounds.
authors.affiliation: National Institute of Standards and Technology (NIST), Boulder, CO 80303, USA NIST, Gaithersburg, MD 20899-8371, USA.
authors.initials: DA
authors.lastname: Wollman
authors.initials: SW
authors.lastname: Nam
authors.initials: GC
authors.lastname: Hilton
authors.initials: KD
authors.lastname: Irwin
authors.initials: NF
authors.lastname: Bergren
authors.initials: DA
authors.lastname: Rudman
authors.initials: JM
authors.lastname: Martinis
authors.initials: DE
authors.lastname: Newbury