Optical properties of a thin-film stack illuminated by a focused field
Reflectance (R), transmittance (T), and absorptance (A) are calculated for a thin-film stack illuminated by a focused field. Based on Debye's integral representation, the electric and magnetic fields near focus are obtained, and the formulas for R, T, and A are represented as integrals of Poynting vectors. This formulation is applied to the case of a numerical aperture (N.A.) greater than 1.0 as well as to the case of a N.A. less than 1.0, and the corresponding numerical results are presented. They reveal that R, T, and A vary with N.A. and that the amount of variation increases with layer thickness.
Opto-mechatronics Laboratory, Corporate Research and Development Center, Samsung Electronics Company Ltd, Suwon City, Kyungki-Do, Korea. kimss@secns.sc.samsung.co.kr
SS
Kim
YK
Kim
IS
Park
SC
Shin