title: Atomic scattering factors for K-shell and L-shell ionization by fast electrons
abstract: Atomic scattering factors have been calculated for K-shell ionization for elements in the range Z = 6 (carbon) to Z = 50 (tin) and for L-shell ionization in the range Z = 20 (calcium) to Z = 60 (neodymium). The calculations are based on relativistic Hartree-Fock wave functions for the atomic bound states and Hartree-Slater wave functions for the continuum wave functions. The results are presented in tabular form such that accurate values of the scattering factors can be obtained by cubic spline interpolation for incident electron energies between 50 and 400 keV and for scattering vectors with magnitude s = sin straight theta / lambda up to 2.5 A(-1) (2straight theta is the scattering angle and lambda the wavelength of the incident electrons). A separate parameterization of the form factors is given for 2.5 </= s </= 20 A(-1), where they are small. In addition, a simpler but less accurate parameterization of the atomic scattering factors in an exponential form has been obtained by fitting the calculated form factors in the region s </= 2.5 A(-1). The scattering factors are suitable for the calculation of ionization cross sections for use in atom location by channelling-enhanced microanalysis (ALCHEMI).
authors.affiliation: School of Physics, University of Melbourne, Parkville, Victoria 3052, Australia.
authors.initials: MP
authors.lastname: Oxley
authors.initials: LJ
authors.lastname: Allen