title: [Microsystem and its application fom bioengineering].
authors.affiliation: New Industry Creation Hatchery Center, Tohoku University, Sendai, Japan. tono@cc.mech.tohoku.ac.jp
authors.forename: T
authors.initials: T
authors.lastname: Ono
authors.forename: Y
authors.initials: Y
authors.lastname: Haga
authors.forename: K
authors.initials: K
authors.lastname: Takahashi
authors.forename: M
authors.initials: M
authors.lastname: Esashi
mesh_terms: D001671:Biochemistry / Q000295:instrumentation; D015374:Biosensing Techniques; D001709:Biotechnology / Q000295:instrumentation; D002404:Catheterization; D004586:Electrophoresis; D020527:Microscopy, Scanning Probe; D008904:Miniaturization; D020411:Oligonucleotide Array Sequence Analysis; D016133:Polymerase Chain Reaction; D012666:Semiconductors