title: A reconstruction method of surface morphology with genetic algorithms in the scanning electron microscope.
abstract: A reconstruction method of surface morphology with genetic algorithms from a line scan in the scanning electron microscope (SEM) has been developed. This method is an application of genetic algorithms, which are search algorithms based on the mechanics of natural selection and genetics, to surface morphology in SEM. To reconstruct the microstructures of a specimen surface on a substrate, the system requires only a line scan taken by a conventional SEM. To deal with statistical fluctuations in the grey level of each pixel on the experimental line scan, the reduced chi-square distribution is used as the objective function and a scheme for minimizing the number of vertices in the reconstructed surface profile is adopted. The resolution in the Z-direction tends to be statistical and independent of the angle of the specimen surface.
authors: Department of Computational Science and Engineering, School of Engineering, Nagoya University, Japan.
authors: X
authors: X
authors: Li
authors: T
authors: T
authors: Kodama
authors: Y
authors: Y
authors: Uchikawa