Development of an X-ray photoemission electron microscopy system with multi-probes, and its application to surface imaging at static and dynamic states.
We have developed a new X-ray photoemission electron microscopy system combined with low energy electron microscopy, photoemission electron microscopy, mirror electron microscopy (MEM), secondary electron emission microscopy (SEEM) and Auger electron emission microscopy, which provides multi-angle information on the distribution and change of element, chemical state, structure, etc. at solid surfaces under the working conditions such as high temperature and gas atmosphere. The performance of each microscopical method was examined and typical images are presented. The dynamic behaviour of fabricated surfaces has been imaged in real time by SEEM and MEM.
Takakusagi
S
S
Department of Chemistry, Graduate School of Science, The University of Tokyo, Hongo, Bunkyo-ku, Tokyo 113-0033, Japan.
Kato
M
M
Sakai
Y
Y
Fukui
K
K
Asakura
K
K
Iwasawa
Y
Y