title: Measures for spectral quality in low-voltage X-ray microanalysis.
abstract: Characteristic x-ray production with energetic electrons depends strongly on the overvoltage, the ratio of the incident beam energy to the critical excitation energy for the atomic species of interest. Low-voltage x-ray microanalysis (beam energy < or = 5 keV) is especially susceptible to artifacts due to sample charging because the overvoltage is low and even slight charging can strongly affect peak intensities. The Duane-Hunt bremsstrahlung limit is a good diagnostic to detect sample charging. Dynamic charging effects, however, can influence spectra despite an apparently satisfactory Duane-Hunt limit. Dynamic charging effects must be examined by time series experiments, or through use of dynamic energy windows continuously measuring count rates placed across the spectrum. When charging is a problem, conductive surface coatings can eliminate the effects. When pristine surfaces must be examined without coating, the use of a conductive grid can control charging so that useful x-ray spectra can be obtained.
authors.affiliation: National Institute of Standards and Technology, Gaithersburg, Maryland 20899-8371, USA.
authors.forename: D E
authors.initials: DE
authors.lastname: Newbury
mesh_terms: D016477:Artifacts; D004577:Electron Probe Microanalysis / Q000379:methods* / Q000592:standards; D004583:Electrons; D008855:Microscopy, Electron, Scanning; D017785:Photons; D012822:Silicon Dioxide / Q000032:analysis
chemical_list: D012822:Silicon Dioxide