title: Diffraction by a microrelief grating.
abstract: A model is proposed that describes diffraction by a microrelief grating. A microrelief grating is a grating of large period with grooves containing a periodic microrelief with a period considerably smaller than the period of the grating. In the model the interaction of the incident wave with the fine structure is taken into account rigorously while features of the grating that are large compared with the wavelength are modeled as phase or amplitude objects.
authors.affiliation: Philips Research Laboratories, Eindhoven, The Netherlands.
authors.forename: P
authors.initials: P
authors.lastname: Rusek
authors.forename: H P
authors.initials: HP
authors.lastname: Urbach