Surface modification of titanium through amino group implantation.
We modified Ti surfaces by implantation of amino (NH(2+)) groups at 10(16) and 10(17) cm(-2). The implanted surfaces were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning Auger electron spectroscopy (AES), and second ion mass spectroscopy (SIMS). The experimental results showed that the implanted Ti specimens were covered by a dominant hydrocarbon overlayer due to contamination and the surface oxide layer of implanted specimens became thicker. XPS, AES, and SIMS depth profiles showed that implanted elements had a typical ion implantation distribution and that titanium nitride (TiN) was formed.
Beijing Fine Ceramics Laboratory, State Key Laboratory of New Ceramics and Fine Processing, Institute of Nuclear Energy Technology, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, PRChina. yangyz@tsinghua.edu.cn
Y Z
YZ
Yang
J M
JM
Tian
J T
JT
Tian
Z Q
ZQ
Chen
D000588:Amines / Q000737:chemistry; D001672:Biocompatible Materials / Q000737:chemistry; D066298:In Vitro Techniques; D008422:Materials Testing; D018629:Spectrometry, Mass, Secondary Ion; D013052:Spectrometry, X-Ray Emission; D013499:Surface Properties; D014025:Titanium / Q000737:chemistry; D014961:X-Ray Diffraction
D000588:Amines; D001672:Biocompatible Materials; D014025:Titanium