Development of a 1 MV field-emission transmission electron microscope.
We developed a 1 MV field-emission transmission electron microscope. This paper reports details and specifications of the instrument. The microscope was designed to obtain a bright and coherent electron beam by using the field emission gun equipped with a pre-accelerating magnetic lens and the high-voltage power supply with high stability (0.5 ppm min(-1)). Using this microscope, the brightness of 1.8 x 10(10) A cm(-2) sr(-1) and the lattice resolution of 49.8 pm were attained.
Advanced Research Laboratory, Hitachi, Ltd, Hatoyama, Saitama, Japan. tkawa@harl.hitachi.co.jp
T
T
Kawasaki
I
I
Matsui
T
T
Yoshida
T
T
Katsuta
S
S
Hayashi
T
T
Onai
T
T
Furutsu
K
K
Myochin
M
M
Numata
H
H
Mogaki
M
M
Gorai
T
T
Akashi
O
O
Kamimura
T
T
Matsuda
N
N
Osakabe
A
A
Tonomura
K
K
Kitazawa