Development of a 1 MV field-emission transmission electron microscope.
We developed a 1 MV field-emission transmission electron microscope. This paper reports details and specifications of the instrument. The microscope was designed to obtain a bright and coherent electron beam by using the field emission gun equipped with a pre-accelerating magnetic lens and the high-voltage power supply with high stability (0.5 ppm min(-1)). Using this microscope, the brightness of 1.8 x 10(10) A cm(-2) sr(-1) and the lattice resolution of 49.8 pm were attained.
Kawasaki
T
T
Advanced Research Laboratory, Hitachi, Ltd, Hatoyama, Saitama, Japan. tkawa@harl.hitachi.co.jp
Matsui
I
I
Yoshida
T
T
Katsuta
T
T
Hayashi
S
S
Onai
T
T
Furutsu
T
T
Myochin
K
K
Numata
M
M
Mogaki
H
H
Gorai
M
M
Akashi
T
T
Kamimura
O
O
Matsuda
T
T
Osakabe
N
N
Tonomura
A
A
Kitazawa
K
K