title: Non-optical tip-sample distance control method for scanning near-field optical microscopy using a piezoresistive micro cantilever.
abstract: A piezoresistive micro cantilever is applied to monitor the displacement of an optical fibre probe and to control tip-sample distance. The piezoresistive cantilever was originally made for a self-sensitive atomic force microscopy (AFM) probe and has dimensions of 400 microm length, 50 microm width and 5 microm thickness with a resistive strain sensor at the bottom of the cantilever. We attach the piezoresistive cantilever tip to the upper side of a vibrating bent optical fibre probe and monitor the resistance change amplitude of the strain sensor caused by the optical fibre displacement. By using this resistance change to control the tip-sample distance, the two-cantilever system successfully provides topographic and near-field optical images of standard samples in a scanning near-field optical microscopy (SNOM)/AFM system. A resonant characteristic of the two-cantilever system is also simulated using a mechanical model, and the results of simulation correspond to the experimental results of resonance characteristics.
authors: R & D Center, Seiko Instruments, Takatsuka-shinden, Matsudo, Chiba 270-2222, Japan. muramatu@tk.sii.co.jp
authors: H
authors: H
authors: Muramatsu
authors: A
authors: A
authors: Egawa
authors: K
authors: K
authors: Homma
authors: J M
authors: JM
authors: Kim
authors: H
authors: H
authors: Takahashi
authors: Y
authors: Y
authors: Shirakawabe
authors: N
authors: N
authors: Shimizu