Effect of an internal rotating current on low-frequency inductively coupled plasmas.
The effect of an internal low-frequency rotating current on inductively coupled plasmas in cylindrical chambers is studied. The electromagnetic field structure, power density distribution, the plasma density, and the operating regimes of the discharge are investigated using electrodynamic, power, and particle balance equations. It is shown that the rotating current sheet can dramatically improve the uniformity of the electromagnetic fields and the power transferred to the plasma electrons from that of conventional low-frequency inductively coupled plasma sources with external flat spiral inductive coils.
Tsakadze
E L
EL
Plasma Processing Laboratory, NIE, Nanyang Technological University, 1 Nanyang Walk, 637616 Singapore, Republic of Singapore.
Ostrikov
K N
KN
Xu
S
S
Jones
I R
IR
Storer
R
R
Yu
M Y
MY
Lee
S
S