title: Silicon technology-based micro-systems for atomic force microscopy/photon scanning tunnelling microscopy.
abstract: We developed silicon nitride cantilevers integrating a probe tip and a wave guide that is prolonged on the silicon holder with one or two guides. A micro-system is bonded to a photodetector. The resulting hybrid system enables us to obtain simultaneously topographic and optical near-field images. Examples of images obtained on a longitudinal cross-section of an optical fibre are shown.
authors: CEM2, Université Montpellier II, 34095 Montpellier Cedex 5, France. gall@cem2.univ-montp2.fr
authors: P
authors: P
authors: Gall-Borrut
authors: B
authors: B
authors: Belier
authors: P
authors: P
authors: Falgayrettes
authors: M
authors: M
authors: Castagne
authors: C
authors: C
authors: Bergaud
authors: P
authors: P
authors: Temple-Boyer