Silicon technology-based micro-systems for atomic force microscopy/photon scanning tunnelling microscopy.
We developed silicon nitride cantilevers integrating a probe tip and a wave guide that is prolonged on the silicon holder with one or two guides. A micro-system is bonded to a photodetector. The resulting hybrid system enables us to obtain simultaneously topographic and optical near-field images. Examples of images obtained on a longitudinal cross-section of an optical fibre are shown.
Gall-Borrut
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CEM2, Université Montpellier II, 34095 Montpellier Cedex 5, France. gall@cem2.univ-montp2.fr
Belier
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Falgayrettes
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Castagne
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Bergaud
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Temple-Boyer
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