Effects of layer thickness for SAW, PSAW, and HVPSAW devices.
Considerable efforts in recent SAW device design and development have been aimed at obtaining high frequency, low loss, and high performance. A large number of applications relate to cellular and mobile telephony, pagers, local area networks, cordless phones, global positioning systems (GPS), and security systems. Pseudo-SAW (PSAW) and high velocity PSAW (HVPSAW) have received great attention because of their high phase velocities and, therefore, the high frequencies of operation that these modes provide. In addition to high phase velocities, the pseudomodes must also present low propagation losses and considerably high electromechanical coupling coefficients to be considered for surface acoustic wave (SAW) devices. This paper verifies that the metallic layer thickness is a relevant SAW device parameter, which must be considered to achieve lower losses for high frequency, low loss SAW devices. Popular PSAW and HVPSAW material orientations, such as 64 degrees YX LiNbO3 (0 degree -26 degrees 0 degree), 36 degrees YX LiTaO3 (0 degree -54 degrees 0 degree), LiNbO3 (90 degrees 90 degrees 36 degrees), LiTaO3 (90 degrees 90 degrees 31 degrees), and Li2B4O7 (0 degree 47.3 degrees 90 degrees), are considered as examples. In addition to the reduced loss analysis and the dispersion analysis for the pseudo modes, the present work discusses the transitions with respect to the layer thickness from the PSAWs and HVPSAWs to the generalized SAWs (GSAWs) and Rayleigh (sagittal particle motion) modes. In addition to contributing to the knowledge of the pseudomodes behavior with layer thickness, this mode transition analysis enlightens the situation in which the losses in the pseudo modes go to zero because of the merging of the pseudo modes into the SAWs (GSAWs and Rayleigh). The fact that the SAWs are a continuation as a function of thickness for the pseudo modes may be conveniently used in the fabrication of low loss devices. In addition, the effects of heavy layer metals, such as gold, in reducing the layer thickness at which the pseudo modes merge to the SAWs are discussed. Numerical results are compared with experimental data available in the literature, and the present analysis elucidates experimentally observed higher order pseudo modes and values of layer thickness for which lower losses are achieved.
da Cunha
M P
MP
Department of Electrical Engineering, University of São Paulo, São Paulo, SP, CEP 05508-900, Brazil. mcunha@lme.usp.br