Fabrication and observation of a standard sample for near-field optical microscopy.
We fabricated a standard sample for a near-field optical microscope using scanning probe lithography. The sample contains a wedged pattern, which allows the measurement of various sizes within one image. The optical resolution of our near-field optical microscope has been evaluated as 40 nm, which was obtained by measuring the narrowest separable gap width of the wedged pattern. Thus a standard sample containing the wedged pattern enables clear evaluation of the resolution.
Kato
M
M
Advanced Research Laboratory, Hitachi Ltd., Hatoyoama, Saitama, Japan. kato@harl.hitachi.co.jp
Kiguchi
M
M
Ishibashi
M
M
Heike
S
S