title: High-speed scanning by dual feedback control in SNOM/AFM.
abstract: We have developed a high-speed scanning near-field optical microscope (SNOM)/atomic force microscope (AFM) system including dual feedback controllers. The system includes an additional piezoelectric actuator with fast response in the z direction and a correction circuit to eliminate unnecessary components from the feedback signal. From the measurement of a patterned chromium layer of 2 x 2 microm2 checks on a quartz glass plate, we confirmed that our system had more effective feedback control and faster scanning than current SNOM/AFM systems that use only a piezo-tube. The scanning speed of the present system was estimated to be about five times faster than that of current SNOM/AFM systems.
authors.affiliation: Corporate R & D, Seiko Instruments Inc., Chiba, Japan. egawa@tk.sii.co.jp
authors.forename: A
authors.initials: A
authors.lastname: Egawa
authors.forename: N
authors.initials: N
authors.lastname: Chiba
authors.forename: K
authors.initials: K
authors.lastname: Homma
authors.forename: K
authors.initials: K
authors.lastname: Chinone
authors.forename: H
authors.initials: H
authors.lastname: Muramatsu