High-speed scanning by dual feedback control in SNOM/AFM.
We have developed a high-speed scanning near-field optical microscope (SNOM)/atomic force microscope (AFM) system including dual feedback controllers. The system includes an additional piezoelectric actuator with fast response in the z direction and a correction circuit to eliminate unnecessary components from the feedback signal. From the measurement of a patterned chromium layer of 2 x 2 microm2 checks on a quartz glass plate, we confirmed that our system had more effective feedback control and faster scanning than current SNOM/AFM systems that use only a piezo-tube. The scanning speed of the present system was estimated to be about five times faster than that of current SNOM/AFM systems.
Egawa
A
A
Corporate R & D, Seiko Instruments Inc., Chiba, Japan. egawa@tk.sii.co.jp
Chiba
N
N
Homma
K
K
Chinone
K
K
Muramatsu
H
H