title: Fabrication and observation of a standard sample for near-field optical microscopy.
abstract: We fabricated a standard sample for a near-field optical microscope using scanning probe lithography. The sample contains a wedged pattern, which allows the measurement of various sizes within one image. The optical resolution of our near-field optical microscope has been evaluated as 40 nm, which was obtained by measuring the narrowest separable gap width of the wedged pattern. Thus a standard sample containing the wedged pattern enables clear evaluation of the resolution.
authors.affiliation: Advanced Research Laboratory, Hitachi Ltd., Hatoyoama, Saitama, Japan. kato@harl.hitachi.co.jp
authors.forename: M
authors.initials: M
authors.lastname: Kato
authors.forename: M
authors.initials: M
authors.lastname: Kiguchi
authors.forename: M
authors.initials: M
authors.lastname: Ishibashi
authors.forename: S
authors.initials: S
authors.lastname: Heike